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J-GLOBAL ID:200902156949868283   Reference number:93A0274865

Structural properties of BaTiO3 thin films on Si grown by metalorganic chemical vapor deposition.

Si上に有機金属化学蒸着により成長させたBaTiO3膜の構造
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Volume: 73  Issue:Page: 1547-1549  Publication year: Feb. 01, 1993 
JST Material Number: C0266A  ISSN: 0021-8979  CODEN: JAPIAU  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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