Art
J-GLOBAL ID：200902157361391002
Reference number：98A0550197
Area-selective nucleation of copper on fluorocarbon-resin surface using ArF excimer laser-induced chemical modification.
ArFエキシマレーザ誘起化学修飾法を使用したふっ化炭素樹脂表面での銅の領域選択核生成
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Author (2)：
,
Material：
Volume：
72
Issue：
20
Page：
2616-2618
Publication year：
May. 18, 1998
JST Material Number：
H0613A
ISSN：
0003-6951
CODEN：
APPLAB
Document type：
Article
Article type：
短報
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films
, Photochemical reactions
Terms in the title (6)：
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