Art

J-GLOBAL ID：200902157636956820   Reference number：98A0118180

Nanometer level autofocus air gauge.

Author (4)： THOMAS T (Etec Systems, Inc., OR) ,  HAMAKER C (Etec Systems, Inc., OR) ,  MARTYNIUK J (Etec Systems, Inc., OR) ,  MIRRO G (Etec Systems, Inc., OR)
Material： Proceedings. 12th Annual Meeting of the American Society for Precision Engineering, 1997  (Proc 12th Annu Meet Am Soc Precis Eng 1997)
Page： 178-182  Publication year： 1997 
JST Material Number： K19970645  ISBN： 1-887706-18-6  Document type： Proceedings
Country of issue： United States (USA)  Language： ENGLISH (EN)