Art
J-GLOBAL ID：200902157823154885
Reference number：94A0129175
Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation.
偏光レーザ照射による高分子表面上のサブハーフミクロン周期構造
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Author (2)：
,
Material：
Volume：
32
Issue：
12B
Page：
6182-6184
Publication year：
Dec. 1993
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Laser irradiation effects and damages
, Techniques for samples
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