Energetic oxygen ions in ZrO<sub>2</sub> deposition by reactive sputtering of Zr.

TOMINAGA K; KIKUMA T; KUSAKA K; HANABUSA T

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J-GLOBAL ID：200902158221691894 Reference number：02A0687161

Energetic oxygen ions in ZrO₂ deposition by reactive sputtering of Zr.

Zrの反応性スパッタリングによるZrO₂堆積中の高エネルギー酸素イオン

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Author (4)： , , ,
Material：
Volume： 66 Issue： 3/4 Page： 279-284 Publication year： Aug. 19, 2002
JST Material Number： E0347A ISSN： 0042-207X Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Oxide thin films

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Energetic oxygen ions in ZrO2 deposition by reactive sputtering of Zr.

Energetic oxygen ions in ZrO₂ deposition by reactive sputtering of Zr.