MEMS-Micropumps: A Review.

NGUYEN N-T; HUANG X; CHUAN T K

Art

J-GLOBAL ID：200902158461708859 Reference number：02A0526043

MEMS-Micropumps: A Review.

MEMS型マイクロポンプ展望

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Author (3)： , ,
Material：
Volume： 124 Issue： 2 Page： 384-392 Publication year： Jun. 2002
JST Material Number： C0997A ISSN： 0098-2202 CODEN： JFEGA4 Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Pumps,various pumping equipment

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