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J-GLOBAL ID:200902158578287714   Reference number:99A0892752

A surfactant-mediated relaxed Si0.5Ge0.5 graded layer with a very low threading dislocation density and smooth surface.

非常に低い貫通転位密度および滑らかな表面を持つ表面活性剤媒介による緩和したSi0.5Ge0.5傾斜層
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Volume: 75  Issue: 11  Page: 1586-1588  Publication year: Sep. 13, 1999 
JST Material Number: H0613A  ISSN: 0003-6951  CODEN: APPLAB  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Semiconductor thin films 
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