Growth mechanisms of DLC films from C<sup>+</sup> ions: experimental studies.

LIFSHITZ Y; LEMPERT G D; GROSSMAN E; AVIGAL I; UZAN-SAGUY C; KALISH R; KULIK J; MARTON D; RABALAIS J W

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J-GLOBAL ID：200902158675556029 Reference number：95A0432677

Growth mechanisms of DLC films from C⁺ ions: experimental studies.

C⁺イオンからのDLC膜の成長機構実験的研究

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Volume： 4 Issue： 4 Page： 318-323 Publication year： Apr. 15, 1995
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Carbon and its compounds

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Growth mechanisms of DLC films from C+ ions: experimental studies.

Growth mechanisms of DLC films from C⁺ ions: experimental studies.