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J-GLOBAL ID：200902159816101230   Reference number：98A0876595

Exploiting the properties of carbon nanotubes for nanolithography.

ナノリソグラフィーのための炭素ナノチューブの利用
Author (3)：
DAI H

About DAI H

(Stanford Univ., California)

About Stanford Univ., California

, 
FRANKLIN N

About FRANKLIN N

(Stanford Univ., California)

About Stanford Univ., California

, 
HAN J

About HAN J

(NASA Ames Res. Center, California)

About NASA Ames Res. Center, California


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 73  Issue： 11  Page： 1508-1510  Publication year： Sep. 14, 1998 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*atomic force microscope

About atomic force microscope

,...
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JST classification (1)：
JST classification
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Surface structure of semiconductors 
(BK15030A)

About Surface structure of semiconductors

Terms in the title (2)：
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ナノリソグラフィー

About ナノリソグラフィー

, 
炭素ナノチューブ

About 炭素ナノチューブ


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