Art
J-GLOBAL ID：200902159880251717   Reference number：98A0861043

Material-wave nanotechnology: Nanofabrication using a de Broglie wave.

材料-波動ナノ技術 de Broglie波を用いたナノ作製
Author (2)：
MATSUI S

About MATSUI S

(NEC Corp., Tsukuba, JPN)

About NEC Corp., Tsukuba, JPN

, 
FUJITA J

About FUJITA J

(NEC Corp., Tsukuba, JPN)

About NEC Corp., Tsukuba, JPN


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 16  Issue： 4  Page： 2439-2443  Publication year： Jul. 1998 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*holography application

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,...
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Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
電子ビームホログラフィー

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Particle optics in general 
(BD02010J)

About Particle optics in general

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
波動

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, 
ナノ技術

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, 
作製

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