Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions.

OLOWOLAFE J O; JONES R E JR; CAMPBELL A C; HEGDE R I; MOGAB C J; GREGORY R B

Art

J-GLOBAL ID：200902160584452934 Reference number：93A0314430

Effects of anneal ambients and Pt thickness on Pt/Ti and Pt/Ti/TiN interfacial reactions.

Pt/TiおよびPt/Ti/TiN界面反応への焼鈍環境およびPtの厚さの効果

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Author (6)： , , , , ,
Material：
Volume： 73 Issue： 4 Page： 1764-1772 Publication year： Feb. 15, 1993
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Metallic thin films

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