Art
J-GLOBAL ID：200902160628137411   Reference number：97A0719300

Single-crystal Si films for thin-film transistor devices.

薄膜トランジスタ素子用の単結晶Si膜
Author (3)：
IM J S

About IM J S

(Columbia Univ., New York)

About Columbia Univ., New York

, 
SPOSILI R S

About SPOSILI R S

(Columbia Univ., New York)

About Columbia Univ., New York

, 
CROWDER M A

About CROWDER M A

(Columbia Univ., New York)

About Columbia Univ., New York


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 70  Issue： 25  Page： 3434-3436  Publication year： Jun. 23, 1997 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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thin film transistor

About thin film transistor

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

,  Semiconductor integrated circuit 
(NC03162T)

About Semiconductor integrated circuit

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
薄膜

About 薄膜

, 
トランジスタ素子

About トランジスタ素子

, 
単結晶

About 単結晶

, 
Si膜

About Si膜


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