Art
J-GLOBAL ID:200902161808737871   Reference number:95A0692821

Silicon on insulator material technology.

シリコンオン絶縁物材料技術
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Volume: 31  Issue: 14  Page: 1201-1202  Publication year: Jul. 06, 1995 
JST Material Number: A0887A  ISSN: 0013-5194  CODEN: ELLEAK  Document type: Article
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Materials of solid-state devices 
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