Art
J-GLOBAL ID：200902161808737871   Reference number：95A0692821

Silicon on insulator material technology.

シリコンオン絶縁物材料技術
Author (1)：
BRUEL M

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(CENG, Grenoble, FRA)

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Material：
Electronics Letters  (Electron Lett)

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Volume： 31  Issue： 14  Page： 1201-1202  Publication year： Jul. 06, 1995 
JST Material Number： A0887A  ISSN： 0013-5194  CODEN： ELLEAK  Document type： Article
Article type： 短報  Country of issue： United Kingdom (GBR)  Language： ENGLISH (EN)
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SOI structure

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Materials of solid-state devices 
(NC03020K)

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絶縁物

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