Art
J-GLOBAL ID:200902163017128173   Reference number:01A0314661

A Study on Polishing Disc Using Granulated Abrasives.

粒状化ポリシングディスクに関する一考察
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Issue: 35  Page: 7-12  Publication year: Dec. 20, 2000 
JST Material Number: S0436A  ISSN: 0385-4124  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Grinding and abrasion materials  ,  Manufacturing technology of solid-state devices 
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