Art
J-GLOBAL ID：200902163400507625   Reference number：97A0208193

Proposed bi-axial Silicon Angular Rate Sensor.

2軸シリコン角速度センサの提案
Author (5)：
FUJITA T

About FUJITA T

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
KONISHI Y

About KONISHI Y

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
KENNY R

About KENNY R

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
MAENAKA K

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(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN

, 
MAEDA M

About MAEDA M

(Himeji Inst. Technol., Hyogo, JPN)

About Himeji Inst. Technol., Hyogo, JPN


Material：
Technical Digest of the Sensor Symposium  (Proceedings of the Sensor Symposium)

About Technical Digest of the Sensor Symposium


Volume： 14th  Page： 43-46  Publication year： Jun. 1996 
JST Material Number： X0768A  Document type： Proceedings
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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gyroscope

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of time,speed,acceleration,angular veloc? 
(AD05040K)

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2軸

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シリコン

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速度センサ

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提案

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