Art
J-GLOBAL ID：200902164045944993   Reference number：99A0104300

Effect of Gas Addition on Ozone Ashing.

オゾン灰化に対するガス添加の影響
Author (2)：
OMIYA K

About OMIYA K

(Toshiba Corp., Yokohama, JPN)

About Toshiba Corp., Yokohama, JPN

, 
KATAOKA Y

About KATAOKA Y

(Toshiba Corp., Yokohama, JPN)

About Toshiba Corp., Yokohama, JPN


Material：
Journal of the Electrochemical Society  (J Electrochem Soc)

About Journal of the Electrochemical Society


Volume： 145  Issue： 12  Page： 4323-4327  Publication year： Dec. 1998 
JST Material Number： C0285A  ISSN： 1945-7111  CODEN： JESOAN  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*Ozone

About Ozone

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Other noncatalytic reactions 
(CB06070U)

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Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Methanol

About Methanol

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
オゾン

About オゾン

, 
灰化

About 灰化


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