Art
J-GLOBAL ID：200902164255079063   Reference number：95A0060641

DLC Film Formation and Implantation by Ion Beams.

イオンビームによるDLC膜の創製と改質
Author (3)：
FUNADA YOSHINORI

About FUNADA YOSHINORI

(石川県工試)

About 石川県工試

, 
AWAZU KAORU

About AWAZU KAORU

(石川県工試)

About 石川県工試

, 
SHIMAMURA KISABURO

About SHIMAMURA KISABURO

(オンワード技研)

About オンワード技研


Material：
先端加工  (先端加工学会誌)

About 先端加工


Issue： 13  Page： 83-89  Publication year： Sep. 1994 
JST Material Number： L2222A  ISSN： 0916-3468  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
ion beam mixing

About ion beam mixing

,...
   To see more with JDream III (charged).   {{ this.onShowAbsJLink("http://jdream3.com/lp/jglobal/index.html?docNo=95A0060641&from=J-GLOBAL&jstjournalNo=L2222A") }}
JST classification (2)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
イオンビーム

About イオンビーム

, 
DLC膜

About DLC膜

, 
創製

About 創製

, 
改質

About 改質


Return to Previous Page

TOP

BOTTOM