Art
J-GLOBAL ID:200902164786029702   Reference number:98A0506028

The resistivity variation by heatteatment of ITO thin films. (2).

ITO薄膜の熱処理による抵抗変化 (2)
Author (2):
Material:
Volume: 45th  Issue:Page: 634  Publication year: Mar. 1998 
JST Material Number: Y0054A  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
Terms in the title (3):
Terms in the title
Keywords automatically extracted from the title.

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