Art
J-GLOBAL ID:200902164845264370   Reference number:93A0878993

A compact micropositioner for use in ultrahigh vacuum.

超高真空中で使用するための小型微小位置決め装置
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Volume: 64  Issue:Page: 2687-2690  Publication year: Sep. 1993 
JST Material Number: D0517A  ISSN: 0034-6748  CODEN: RSINAK  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Microscopy determination of structures  ,  Vacuum production and techniques 
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