Art
J-GLOBAL ID：200902164845264370   Reference number：93A0878993

A compact micropositioner for use in ultrahigh vacuum.

超高真空中で使用するための小型微小位置決め装置
Author (4)：
CURTIS R

About CURTIS R

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
PEARSON C

About PEARSON C

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
GAARD P

About GAARD P

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota

, 
GANZ E

About GANZ E

(Univ. Minnesota, Minnesota)

About Univ. Minnesota, Minnesota


Material：
Review of Scientific Instruments  (Rev Sci Instrum)

About Review of Scientific Instruments


Volume： 64  Issue： 9  Page： 2687-2690  Publication year： Sep. 1993 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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ultra high vacuum

About ultra high vacuum

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Microscopy determination of structures 
(BK01040E)

About Microscopy determination of structures

,  Vacuum production and techniques 
(BA02020L)

About Vacuum production and techniques

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
高真空

About 高真空

, 
微小

About 微小

, 
位置決め装置

About 位置決め装置


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