Art
J-GLOBAL ID：200902165106422916
Reference number：00A0772103
Feedback Control of Morphology During III-V Semiconductor Growth by Molecular Beam Epitaxy.
分子ビームエピタクシーによるIII-V族半導体成長時のモルフォロジーのフィードバック制御
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Author (5)：
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Material：
Volume：
38th
Issue：
Vol.4
Page：
4204-4209
Publication year：
1999
JST Material Number：
A0744B
ISSN：
0191-2216
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices
, Process controls
Terms in the title (5)：
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