Art
J-GLOBAL ID：200902165441451360   Reference number：97A0328777

Nanocomposite resist system.

ナノ複合物レジスト系
Author (3)：
ISHII T

About ISHII T

(NTT Opto-electronics Lab., Kanagawa, JPN)

About NTT Opto-electronics Lab., Kanagawa, JPN

, 
NOZAWA H

About NOZAWA H

(NTT Opto-electronics Lab., Kanagawa, JPN)

About NTT Opto-electronics Lab., Kanagawa, JPN

, 
TAMAMURA T

About TAMAMURA T

(NTT Opto-electronics Lab., Kanagawa, JPN)

About NTT Opto-electronics Lab., Kanagawa, JPN


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 70  Issue： 9  Page： 1110-1112  Publication year： Mar. 03, 1997 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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resist

About resist

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
複合物

About 複合物

, 
レジスト

About レジスト


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