Development of Measuring System Equipped with Wire Probe to Measure Fine Contour Shape of Penetrated Specimen.

OBARA HARUKI; TSUJI MASAKI; OSUMI TSUYOSHI; HATANO MASATOSHI

Art

J-GLOBAL ID：200902165795663690 Reference number：01A0433281

Development of Measuring System Equipped with Wire Probe to Measure Fine Contour Shape of Penetrated Specimen.

ワイヤプローブを用いた微細貫通形状計測装置の開発

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Material：
Volume： 67 Issue： 4 Page： 633-637 Publication year： Apr. 05, 2001
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measuring methods and instruments of length,area,cross section,volume,angle

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