Art
J-GLOBAL ID：200902166171796668
Reference number：99A0819129
Deposition of Diamond-Like Superhard Materials.
ダイアモンド状超硬物質の蒸着
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Author (1)：
Material：
Volume：
157
Page：
198P
Publication year：
1999
JST Material Number：
B0487A
ISSN：
0081-3869
CODEN：
STPHB
Document type：
Article
Article type：
文献レビュー
Country of issue：
Germany, Federal Republic of (DEU)
Language：
ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films
Terms in the title (3)：
Terms in the title
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