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J-GLOBAL ID:200902167066368975   Reference number:93A0554271

An Ultra Precision Production System Organized by Miniature Robots. 1st Report. Design and Fabrication of a Piezo-Magnetic Mini-Walker.

小型自走機械群による超精密生産機械システム 第1報 自走機械の設計と試作
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Volume: 59  Issue:Page: 1007-1012  Publication year: Jun. 1993 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Design,manufacturing,and components of robots 
Reference (9):
  • 1) K. Lindsey, S. T. Smith and C. J. Robbie : Sub-Nanometer Surface Texture and Profile Measurement with NANOSURF 2, Ann. CIRP, 37, (1988) 519.
  • 2) 松本秀樹, 山口城治, 青山尚之, 下河辺明 : 超高精度直線運動機構 (第2報) -5自由度の制御, 54, 10 (1988) 1945.
  • 3) K. Busch, H. Kunzmann and F. Wawldele : Numerical Error-Correction of a Coordinate Measuring Machine, Proc. Int. Symp. on Metrology for Quality Control in Production, Tokyo, (1984) 278.
  • 4) E. C. Teague : The NIST Molecular Measuring Machine Project : Metrology and Precision Engineering Design, J. Vac. Sci. Technol., B 7 (6), Nov/Dec (1989) 1898.
  • 5) D. W. Pohl : Some Design Criteria in Scanning Tunneling Microscopy, IBM J. Res. Develop., 30, 4, (1986) 417.
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