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J-GLOBAL ID:200902167087992741   Reference number:01A0314020

Microstructure of Sputtered Copper Films Deposited under the Strong Shadow Effect.

強い射影効果のもとで堆積したスパッタ銅膜の構造
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Volume: 44  Issue:Page: 42-46  Publication year: Jan. 20, 2001 
JST Material Number: G0194A  ISSN: 0559-8516  CODEN: SHINA  Document type: Article
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Metallic thin films  ,  Techniques and equipment of thin film deposition 
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