Art

J-GLOBAL ID：200902167564333275   Reference number：99A0407854

Development of Plane Irradiation Type Micro Stereolithography Equipment using Optical Fibers.

光ファイバを用いた平面露光型光造形装置の開発

Author (4)： OTSUBO YOSHIKAZU (近畿大) ,  YAMAMOTO MASAHIKO (近畿大) ,  TADOKORO SATOSHI (神戸大) ,  TAKAMORI TOSHI (神戸大)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 119-E  Issue： 4  Page： 247-253  Publication year： Apr. 01, 1999 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： micromachine ,...

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JST classification (1)： Manufacturing technology of solid-state devices  (NC03030V)

Reference (17)：

• (1) E. W. Becker et. al.: “Fabrication of Microstrucutures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA process)”, Microelectronic Eng., 4, pp. 35- 56 (1986)
• (2) 丸各洋二・大川和夫・早野誠治・斉藤直一郎・中井孝:「光造形法」,日刊工業新聞社(1990)
• (3) Katsumi Yamaguchi and Takeshi Nakamoto: “Consideration on the Accuracy of Fabricating Microstrucutures Using UV Laser Induced Polymerizations”, 5th International Symposium on Micro Machine and Human Science, pp. 171-176 (1994)
• (4) Kouji Ikuta, Ken Hirowatari and Tsukasa Ogata: “Three Dimensional Micro Integrated Fluid System (MIFS) Fabricated by Stereo Lithography”, Proc. of IEEE Micro Electro Mechanical Systems Workshop, pp. 1-6 (1994)
• (5) Tarou Takagi and Naomasa Nakajima: “Architecture Com-bination by Photoforming Process”, Proc. of IEEE Micro Electro Mechanical Systems Workshop, pp. 211-216 (1994)

Terms in the title (4)： 光ファイバ ,  露光 ,  光造形装置 ,  開発