Art
J-GLOBAL ID：200902167790577748
Reference number：97A0592108
Cross-Contamination from Etching Materials in Reactive Ion Etcher.
反応性イオンエッチ装置中のエッチング材料からの交差汚染
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Author (2)：
,
Material：
Volume：
36
Issue：
5A
Page：
2633-2637
Publication year：
May. 1997
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma
, Manufacturing technology of solid-state devices
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,
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