Art
J-GLOBAL ID:200902167959838910   Reference number:01A0829177

MD simulation of cluster formation during sputtering.

スパッタリングの過程でのクラスタ形成のMDシミュレーション
Author (5):
Material:
Volume: 180  Page: 222-229  Publication year: Jun. 2001 
JST Material Number: H0899A  ISSN: 0168-583X  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Semi thesaurus term:
Thesaurus term/Semi thesaurus term
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.

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JST classification
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Sputtering 
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