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J-GLOBAL ID：200902169327491144   Reference number：97A0555870

Measurements of mechanical properties of microfabricated thin films.

微細加工した薄膜の機械的性質の測定
Author (6)：
OGAWA H

About OGAWA H

(AIST, MITI, Ibaraki, JPN)

About AIST, MITI, Ibaraki, JPN

, 
SUZUKI K

About SUZUKI K

(Shonan Inst. Technol., Kanagawa, JPN)

About Shonan Inst. Technol., Kanagawa, JPN

, 
KANEKO S

About KANEKO S

(Olympus Optical Co., Ltd., Tokyo, JPN)

About Olympus Optical Co., Ltd., Tokyo, JPN

, 
NAKANO Y

About NAKANO Y

(Shonan Inst. Technol., Kanagawa, JPN)

About Shonan Inst. Technol., Kanagawa, JPN

, 
ISHIKAWA Y

About ISHIKAWA Y

(AIST, MITI, Ibaraki, JPN)

About AIST, MITI, Ibaraki, JPN

, 
KITAHARA T

About KITAHARA T

(AIST, MITI, Ibaraki, JPN)

About AIST, MITI, Ibaraki, JPN


Material：
Technical Digest. IEEE Micro Electro Mechanical Systems  (IEEE International Conference on Micro Electro Mechanical Systems)

About Technical Digest. IEEE Micro Electro Mechanical Systems


Volume： 10th  Page： 430-435  Publication year： 1997 
JST Material Number： W0377A  ISSN： 1084-6999  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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metallic thin film

About metallic thin film

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Vapor plating 
(WC08022K)

About Vapor plating

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
微細加工

About 微細加工

, 
薄膜

About 薄膜

, 
機械的性質

About 機械的性質


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