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J-GLOBAL ID:200902169583445184   Reference number:98A0653552

High Speed 3-D Shape Measurement Using a Non-Scanning Multiple-Beam Confocal Imaging Sensor.

非走査マルチビーム共焦点撮像系による高速三次元計測
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Volume: 64  Issue:Page: 1022-1028  Publication year: Jul. 1998 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Measurement,testing and reliability of solid-state devices 
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