Micropatterning of Chernical-Vapor-Deposited Diamond Films in Electron Beam Lithography.

KIYOHARA S; AYANO K; ABE T; MORI K

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J-GLOBAL ID：200902169710421842 Reference number：00A0795825

Micropatterning of Chernical-Vapor-Deposited Diamond Films in Electron Beam Lithography.

電子ビームリソグラフィーでの化学蒸着ダイヤモンド膜のマイクロパターン化

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Material：
Volume： 39 Issue： 7B Page： 4532-4535 Publication year： Jul. 30, 2000
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices , Thin films of other inorganic compounds

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5) S. Matsumoto, Y. Sato, M. Kamo and N. Setaka: Jpn. J. Appl. Phys. 21 (1982) L183.

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