Effect of total and oxygen partial pressures on structure of photocatalytic TiO<sub>2</sub> films sputtered on unheated substrate.

ZEMAN P; TAKABAYASHI S

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J-GLOBAL ID：200902169884443144 Reference number：02A0327615

Effect of total and oxygen partial pressures on structure of photocatalytic TiO₂ films sputtered on unheated substrate.

非加熱基板上にスパッタした光触媒性TiO₂膜の構造に及ぼす全圧及び酸素分圧の影響

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Volume： 153 Issue： 1 Page： 93-99 Publication year： Apr. 01, 2002
JST Material Number： D0205C ISSN： 0257-8972 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Oxide thin films , Preparation of catalysts

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Effect of total and oxygen partial pressures on structure of photocatalytic TiO2 films sputtered on unheated substrate.

Effect of total and oxygen partial pressures on structure of photocatalytic TiO₂ films sputtered on unheated substrate.