Art
J-GLOBAL ID：200902170228057163   Reference number：99A0615599

Micromachining on (111)-oriented silicon.

シリコン(111)面の微細加工
Author (3)：
CHOU B C S

About CHOU B C S

(National Sci. Council, Hsinchu, TWN)

About National Sci. Council, Hsinchu, TWN

, 
CHEN C-N

About CHEN C-N

(National Chiao Tung Univ., Hsinchu, TWN)

About National Chiao Tung Univ., Hsinchu, TWN

, 
SHIE J-S

About SHIE J-S

(National Chiao Tung Univ., Hsinchu, TWN)

About National Chiao Tung Univ., Hsinchu, TWN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

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Volume： A75  Issue： 3  Page： 271-277  Publication year： Jun. 08, 1999 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*silicon

About silicon

,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (2)：
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シリコン

About シリコン

, 
微細加工

About 微細加工


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