About KITAJIMA T
About Keio Univ., Yokohama, JPN
About TAKEO Y
About Keio Univ., Yokohama, JPN
About PETROVIC Z L
About Keio Univ., Yokohama, JPN
About MAKABE T
About Keio Univ., Yokohama, JPN
About Applied Physics Letters
About plasma etching
About 容量結合プラズマ
About Applications of plasma
About Manufacturing technology of solid-state devices
About Tetrafluoromethane
About 二周波数
About 容量結合プラズマ
About バイアス電圧