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J-GLOBAL ID:200902171227090805   Reference number:02A0451400

高付加価値を生み出す固定砥粒研磨技術 固定砥粒研磨加工技術実用化への条件と課題

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Volume: 46  Issue:Page: 10-14  Publication year: May. 01, 2002 
JST Material Number: G0120A  ISSN: 0387-1053  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices 
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