Art
J-GLOBAL ID：200902171505925859   Reference number：96A0911922

Ultraprecision ELID-Grinding of Monocrystalline Silicon Carbide.

単結晶SiC材料の超精密ELID研削
Author (2)：
OMORI HITOSHI

About OMORI HITOSHI

(理研)

About 理研

, 
MATSUZAWA TAKASHI

About MATSUZAWA TAKASHI

(理研)

About 理研


Material：
日本機械学会東北支部地方講演会講演論文集

About 日本機械学会東北支部地方講演会講演論文集


Volume： 1996  Issue： Hachinohe  Page： 411-412  Publication year： Aug. 1996 
JST Material Number： L0150A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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silicon carbide

About silicon carbide

,...
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JST classification (1)：
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Manufacturing of ceramics and ceramic whiteware 
(YC03020V)

About Manufacturing of ceramics and ceramic whiteware

Terms in the title (2)：
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超精密

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, 
ELID研削

About ELID研削


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