Art
J-GLOBAL ID:200902171702943559   Reference number:97A0461819

Selective epitaxial growth of GaAs on Si inserting strained short-period superlattices by MBE/MEE.

MBE/MEE法による歪短周期超格子を挿入したSi基板上のGaAs選択成長
Author (5):
Material:
Volume: 44th  Issue:Page: 354  Publication year: Mar. 1997 
JST Material Number: Y0054A  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)
Terms in the title (6):
Terms in the title
Keywords automatically extracted from the title.

Return to Previous Page