Art
J-GLOBAL ID：200902171784961363   Reference number：97A0014656

A polysilicon flow sensor for gas flow meters.

ガス流量計用のポリシリコン流量センサ
Author (3)：
NEDA T

About NEDA T

(Tokyo Gas Co., Ltd., Yokohama, JPN)

About Tokyo Gas Co., Ltd., Yokohama, JPN

, 
NAKAMURA K

About NAKAMURA K

(Tokyo Gas Co., Ltd., Yokohama, JPN)

About Tokyo Gas Co., Ltd., Yokohama, JPN

, 
TAKUMI T

About TAKUMI T

(Tokyo Gas Co., Ltd., Yokohama, JPN)

About Tokyo Gas Co., Ltd., Yokohama, JPN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： 54  Issue： 1/3  Page： 626-631  Publication year： Jun. 1996 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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flow meter

About flow meter

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Experimental,test,measuring techniques and their apparatuses of fluids 
(BC01020K)

About Experimental,test,measuring techniques and their apparatuses of fluids

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
ガス流量計

About ガス流量計

, 
ポリシリコン

About ポリシリコン

, 
流量センサ

About 流量センサ


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