Art
J-GLOBAL ID:200902172015360094
Reference number:96A0631951
High-speed and high-sensitivity silicon-on-insulator metal-semiconductor-metal photodetector with trench structure.
トレンチ構造を有し高速で高感度なSOI基板上の金属-半導体-金属光検出器
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Author (2):
,
Material:
Volume:
69
Issue:
1
Page:
16-18
Publication year:
Jul. 01, 1996
JST Material Number:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
Document type:
Article
Article type:
短報
Country of issue:
United States (USA)
Language:
ENGLISH (EN)
Thesaurus term:
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JST classification (1):
JST classification
Category name(code) classified by JST.
Infrared photometry and photodetectors
Terms in the title (4):
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Keywords automatically extracted from the title.
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,
,
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