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J-GLOBAL ID:200902172472277194   Reference number:02A0200695

Local Mechanical-Stress Control(LMC): A New Technique for CMOS-Performance Enhancement.

局所的機械応力制御(LMC) CMOS性能強化のための新技術
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Volume: 2001  Page: 433-436  Publication year: 2001 
JST Material Number: C0829B  ISSN: 0163-1918  Document type: Proceedings
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Semiconductor integrated circuit  ,  Measurement,testing and reliability of solid-state devices 
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