Art
J-GLOBAL ID:200902172964706694   Reference number:99A0997305

Design and Implementation of High-Speed Planar Si Photodiodes Fabricated on SOI Substrates.

SOI基板上に作られた高速プレーナSiフォトダイオードの設計とその実行
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Volume: 35  Issue: 10  Page: 1478-1482  Publication year: Oct. 1999 
JST Material Number: H0432A  ISSN: 0018-9197  CODEN: IEJQA7  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Photodetectors 
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