Art
J-GLOBAL ID：200902173999493568   Reference number：00A0738708

Bi-directional valve-less micropump fabricated using Deep Reactive Ion Etching.

DRIEにより作成した双方向バルブレスマイクロポンプ
Author (2)：
MATSUMOTO SOHEI

About MATSUMOTO SOHEI

(機械技研)

About 機械技研

, 
MAEDA RYUTARO

About MAEDA RYUTARO

(機械技研)

About 機械技研


Material：
日本伝熱シンポジウム講演論文集

About 日本伝熱シンポジウム講演論文集


Volume： 37th  Issue： Vol.1  Page： 217-218  Publication year： 2000 
JST Material Number： F0872C  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*micromachine

About micromachine

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
valve mechanism

About valve mechanism


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Pumps,various pumping equipment 
(QD05030P)

About Pumps,various pumping equipment

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
DRIE

About DRIE

, 
双方向

About 双方向


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