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J-GLOBAL ID:200902174874133248   Reference number:93A0481351

High Efficiency and High Precision Movement in Polishing Operation by Intelligent Polisher.

特集 仕上作業の軽減化・高精度化を追求する 装置・システム・ロボット・材料 インテリジェントポリシャーによるみがき作業の高能率,高精度化
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Volume:Issue:Page: 48-54  Publication year: Jun. 1993 
JST Material Number: X0147A  ISSN: 0912-5582  Document type: Article
Article type: 解説  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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