Art
J-GLOBAL ID：200902175099256776   Reference number：01A0437376

Overview of low temperature co-fired ceramics tape technology for meso-system technology(MsST).

メソシステム技術(MsST)のための低温同時焼成セラミックテープ技術の概観
Author (4)：
GONGORA-RUBIO M R

About GONGORA-RUBIO M R

(IPT, Sao Paulo, BRA)

About IPT, Sao Paulo, BRA

, 
ESPINOZA-VALLEJOS P

About ESPINOZA-VALLEJOS P

(Univ. Pennsylvania, PA, USA)

About Univ. Pennsylvania, PA, USA

, 
SOLA-LAGUNA L

About SOLA-LAGUNA L

(DuPont Electronic Material, Inc., PR, USA)

About DuPont Electronic Material, Inc., PR, USA

, 
SANTIAGO-AVILES J J

About SANTIAGO-AVILES J J

(Univ. Pennsylvania, PA, USA)

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Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： A89  Issue： 3  Page： 222-241  Publication year： Apr. 15, 2001 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 解説  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
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microelectronics

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,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
低温

About 低温

, 
同時焼成

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, 
セラミック

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, 
テープ

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