Pulsed laser deposition of c-oriented LiNbO<sub>3</sub>/LiTaO<sub>3</sub> optical waveguiding bilayered films on silicon wafers.

GUO X L; LIU Z G; ZHU S N; YU T; XIONG S B; HU W S

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J-GLOBAL ID：200902175153852584 Reference number：96A0709221

Pulsed laser deposition of c-oriented LiNbO₃/LiTaO₃ optical waveguiding bilayered films on silicon wafers.

シリコンウエハ上のc配向したLiNbO₃/LiTaO₃光導波路2層化膜のパルスレーザ蒸着

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Author (6)： , , , , ,
Material：
Volume： 165 Issue： 1/2 Page： 187-190 Publication year： Jul. 1996
JST Material Number： B0942A ISSN： 0022-0248 Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Oxide thin films

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Pulsed laser deposition of c-oriented LiNbO3/LiTaO3 optical waveguiding bilayered films on silicon wafers.

Pulsed laser deposition of c-oriented LiNbO₃/LiTaO₃ optical waveguiding bilayered films on silicon wafers.