Art
J-GLOBAL ID：200902175486839054
Reference number：98A0193161
Surface Cleaning and Carbonaceous Film Removal Using High Pressure, High Temperature Water, and Water/CO2 Mixtures.
高圧,高温の水および水/CO2混合を用いた表面清浄化と炭素質皮膜除去
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Author (2)：
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Material：
Volume：
145
Issue：
1
Page：
284-291
Publication year：
Jan. 1998
JST Material Number：
C0285A
ISSN：
1945-7111
CODEN：
JESOAN
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Materials of solid-state devices
Terms in the title (6)：
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