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J-GLOBAL ID：200902175764881580   Reference number：04A0236004

Development of the non-resonance type ultra-sonic motor and its application for XY-stage

Author (9)：
KOSAKA K

About KOSAKA K

(Kumamoto Technol. Inc., Kumamoto, JPN)

About Kumamoto Technol. Inc., Kumamoto, JPN

, 
EGASHIRA Y

About EGASHIRA Y

(Kumamoto Technol. Inc., Kumamoto, JPN)

About Kumamoto Technol. Inc., Kumamoto, JPN

, 
IWABUCHI T

About IWABUCHI T

(Kumamoto Technol. Inc., Kumamoto, JPN)

About Kumamoto Technol. Inc., Kumamoto, JPN

, 
OKUDERA S

About OKUDERA S

(Kumamoto Technol. Inc., Kumamoto, JPN)

About Kumamoto Technol. Inc., Kumamoto, JPN

, 
NAGAMOTO K

About NAGAMOTO K

(Kumamoto Univ.)

About Kumamoto Univ.

, 
HARADA T

About HARADA T

(Kumamoto Univ.)

About Kumamoto Univ.

, 
ENDO T

About ENDO T

(Kumamoto Univ.)

About Kumamoto Univ.

, 
HASHIGUCHI H

About HASHIGUCHI H

(Kumamoto Univ.)

About Kumamoto Univ.

, 
OHMI T

About OHMI T

(Tohoku Univ.)

About Tohoku Univ.


Material：
1st Korea-Japan Conference on Positioning Technology, 2002  (1st Korea Japan Conf Positioning Technol 2002)

About 1st Korea-Japan Conference on Positioning Technology, 2002


Page： 172-175  Publication year： 2002 
JST Material Number： K20030039  Document type： Proceedings
Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Terms in the title (1)：
Terms in the title
Keywords automatically extracted from the title.
ITS

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