Art
J-GLOBAL ID：200902175882105624   Reference number：01A0083712

Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets.

別個のTiとNiターゲットを用いたTiNi形状記憶合金膜の新しい製作法
Author (4)：
OHTA A

About OHTA A

(National Res. Lab. Metrology, Ibaraki, JPN)

About National Res. Lab. Metrology, Ibaraki, JPN

, 
BHANSALI S

About BHANSALI S

(National Res. Lab. Metrology, Ibaraki, JPN)

About National Res. Lab. Metrology, Ibaraki, JPN

, 
KISHIMOTO I

About KISHIMOTO I

(National Res. Lab. Metrology, Ibaraki, JPN)

About National Res. Lab. Metrology, Ibaraki, JPN

, 
UMEDA A

About UMEDA A

(National Res. Lab. Metrology, Ibaraki, JPN)

About National Res. Lab. Metrology, Ibaraki, JPN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： A86  Issue： 3  Page： 165-170  Publication year： Nov. 15, 2000 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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*shape memory alloy

About shape memory alloy

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Other metallography 
(WB01040Y)

About Other metallography

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Ti

About Ti

, 
Ni

About Ni

, 
ターゲット

About ターゲット

, 
TiNi

About TiNi

, 
形状記憶合金

About 形状記憶合金

, 
製作法

About 製作法


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