Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets.

OHTA A; BHANSALI S; KISHIMOTO I; UMEDA A

Art

J-GLOBAL ID：200902175882105624 Reference number：01A0083712

Novel fabrication technique of TiNi shape memory alloy film using separate Ti and Ni targets.

別個のTiとNiターゲットを用いたTiNi形状記憶合金膜の新しい製作法

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Material：
Volume： A86 Issue： 3 Page： 165-170 Publication year： Nov. 15, 2000
JST Material Number： B0345C ISSN： 0924-4247 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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