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J-GLOBAL ID:200902176223850483   Reference number:98A0135314

The effect of the III/V ratio and substrate temperature on the morphology and properties of GaN- and AlN-layers grown by molecular beam epitaxy on Si(111).

Si(111)上に分子ビームエピタクシーにより成長させたGaN及びAlN層の形態と特性へのIII/V比と基板温度の影響
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Volume: 183  Issue: 1/2  Page: 23-30  Publication year: Jan. 1998 
JST Material Number: B0942A  ISSN: 0022-0248  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Semiconductor thin films 

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