Fabrication Technique of Silicon based Nanometric Oscillators.

SAYA D; TOSHIYOSHI H; FUJITA H; KAWAKATSU H

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J-GLOBAL ID：200902176375643394 Reference number：99A0463145

Fabrication Technique of Silicon based Nanometric Oscillators.

Si基板を用いたナノメートルオーダの機械振動子の作成

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Material：
Volume： 46th Issue： 2 Page： 708 Publication year： Mar. 28, 1999
JST Material Number： Y0054A Document type： Proceedings
Country of issue： Japan (JPN) Language： ENGLISH (EN)

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